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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices (Nato Science Partnership Subseries: 3 (closed)) Buy on Amazon

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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices (Nato Science Partnership Subseries: 3 (closed))

PublisherSpringer
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Book Details

PublisherSpringer
ISBN / ASIN0792350073
ISBN-139780792350071
MarketplaceFrance  🇫🇷

Description

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of
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