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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices (Nato Science Partnership Subseries: 3 (closed))

Name: Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices (Nato Science Partnership Subseries: 3 (closed))
Author: Unknown
ISBN: 9780792350071

PublisherSpringer

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Book Details

PublisherSpringer

ISBN / ASIN0792350073

ISBN-139780792350071

AvailabilityUsually ships in 1 to 3 weeks

Sales Rank13,393,016

MarketplaceUnited States 🇺🇸

Description

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of