Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology) Buy on Amazon
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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Author Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo
Publisher William Andrew
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Book Details
Author(s) Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo
Publisher William Andrew
ISBN / ASIN 0815512201
ISBN-13 9780815512202
Marketplace France 🇫🇷
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Description
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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