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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Name: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
Author: Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo
ISBN: 9780815512202

AuthorStephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo

PublisherWilliam Andrew

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Book Details

Author(s)Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo

PublisherWilliam Andrew

ISBN / ASIN0815512201

ISBN-139780815512202

MarketplaceUnited Kingdom 🇬🇧

Description

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.