Semiconductor Exhaust Ventilation Guidebook
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Book Details
Author(s)
D. Jeff Burton
Publisher
IVE Press, Inc ,U.S.
ISBN / ASIN
1883992087
ISBN-13
9781883992088
Marketplace
India 🇮🇳
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Description
1st Edition. Complete guidance to exhaust ventilation in unique SC wafer fab applications; provides guidelines for establishing inhouse standards of good practice, training programs, and design. SI and US units. 27 charts, 5 forms, 6 checklists, 2 specifications.
