Semiconductor Exhaust Ventilation Guidebook
Book Details
Author(s)D. Jeff Burton
PublisherIVE Press, Inc ,U.S.
ISBN / ASIN1883992087
ISBN-139781883992088
AvailabilityUsually ships in 24 hours
Sales Rank4,863,116
MarketplaceUnited States 🇺🇸
Description
1st Edition. Complete guidance to exhaust ventilation in unique SC wafer fab applications; provides guidelines for establishing inhouse standards of good practice, training programs, and design. SI and US units. 27 charts, 5 forms, 6 checklists, 2 specifications.
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