Design of atmospheric pressure plasma CVD process for deposition of silicon nitride thin films using dielectric barrier discharge.
Price not available for France
You can still browse on Amazon. Try another country above.
Book Details
Author(s)
Shunfu Hu
Publisher
Proquest, Umi Dissertation Publishing
ISBN / ASIN
1243426802
ISBN-13
9781243426802
Marketplace
France 🇫🇷
Ratings & Reviews
No reviews yet — be the first!
No reviews yet.
Description
Book by Hu, Shunfu
