Design of atmospheric pressure plasma CVD process for deposition of silicon nitride thin films using dielectric barrier discharge.
Book Details
Author(s)
Shunfu Hu
Publisher
Proquest, Umi Dissertation Publishing
ISBN / ASIN
1243426802
ISBN-13
9781243426802
Sales Rank
#12,433,759
Marketplace
United States 🇺🇸
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Description
Book by Hu, Shunfu
